Location History:
- Suwon Kyunggi, KR (2007)
- Suwon, KR (2018)
- San Ramon, CA (US) (2019 - 2021)
Company Filing History:
Years Active: 2007-2021
Title: Innovations by Jang Seok Oh in Semiconductor Technology
Introduction
Jang Seok Oh is a prominent inventor based in Suwon, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work focuses on advanced systems and methods that enhance the efficiency and reliability of semiconductor processing.
Latest Patents
One of Jang Seok Oh's latest patents is an advanced in-situ particle detection system for semiconductor substrate processing systems. This invention features a fan, a substrate support, a particle detector, and an exhaust outlet. The design allows for laminar airflow over the substrate, enabling the particle detector to analyze air and detect particle concentration before they are exhausted. This data can be combined with information from other sensors to identify sources of contamination.
Another notable patent is related to an advanced coating method and materials aimed at preventing HDP-CVD chamber arcing. This invention includes a ring-shaped gas distributor for in-situ deposition of coating materials. The design features multiple gas distribution ports arranged in evenly distributed rows, allowing for effective gas direction and minimizing arcing in various chamber types.
Career Highlights
Jang Seok Oh is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His innovative work has positioned him as a key figure in developing technologies that improve semiconductor manufacturing processes.
Collaborations
Throughout his career, Jang has collaborated with notable colleagues, including Lin Zhang and Xuesong Lu. These partnerships have contributed to the advancement of semiconductor technologies and the successful development of his patents.
Conclusion
Jang Seok Oh's contributions to semiconductor technology through his innovative patents demonstrate his expertise and commitment to advancing the field. His work continues to influence the industry and improve manufacturing processes.