This inventor holds 4 USPTO granted patents. Top assignee: Fei Comapny. Active years: 2006-2012.
Company Filing History:
Years Active: 2006-2012
Title: Janet Teshima: Innovator in Semiconductor Defect Analysis
Introduction
Janet Teshima is a prominent inventor based in Hillsboro, OR (US). She has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. Her work focuses on analyzing defects in semiconductor wafers, which is crucial for the fabrication process in semiconductor manufacturing.
Latest Patents
One of Janet's latest patents is a defect analyzer that provides methods, devices, and systems for analyzing defects in objects such as semiconductor wafers. This invention outlines a method for characterizing defects during the fabrication of semiconductor wafers. The process begins with inspecting the wafers to locate defects, which are then stored in a defect file. A dual charged-particle beam system is automatically navigated to the defect location using the information from the defect file. The defect is identified, and a charged particle beam image is obtained for further analysis. A recipe is determined for additional analysis, which is executed to cut a portion of the defect using a charged particle beam. The position of the cut is based on the analysis of the charged particle beam image, and the exposed surface is imaged to gather more information about the defect.
Career Highlights
Janet Teshima has established herself as a key figure in her field through her innovative work at FEI Company. Her expertise in semiconductor technology has led to advancements that enhance the efficiency and accuracy of defect analysis in semiconductor fabrication.
Collaborations
Throughout her career, Janet has collaborated with notable colleagues, including Daniel E Partin and James Edgar Hudson. These collaborations have contributed to her success and the development of her patented technologies.
Conclusion
Janet Teshima's contributions to semiconductor defect analysis exemplify her innovative spirit and dedication to advancing technology. Her patents reflect her commitment to improving the semiconductor manufacturing process, making her a valuable asset in the field.