This inventor holds 1 USPTO granted patent. Top assignee: Chartered Semiconductor Manufacturing Ltd (Corporation). Active years: 2001.
Company Filing History:
Years Active: 2001
Title: Innovations by Jane C M Hui in Semiconductor Technology
Introduction
Jane C M Hui is a notable inventor based in Singapore, recognized for his contributions to semiconductor technology. He has developed a significant patent that addresses the challenges in fabricating integrated circuits. His work focuses on improving the performance and stability of semiconductor devices.
Latest Patents
Jane C M Hui holds a patent titled "Gap filling process in integrated circuits using low dielectric constant materials." This invention aims to enhance the fabrication methods of semiconductor integrated circuit devices. The patent describes an improved process for creating multilevel metal structures utilizing low dielectric constant materials. The invention emphasizes stable and planar intermetal dielectrics, which are crucial for reducing parasitic capacitance in integrated circuits. The first embodiment introduces a stabilizing adhesion layer between the low dielectric constant layer and the top dielectric layer, resulting in improved adhesion and stability. The second embodiment employs a multi-layered hard mask on metal interconnect lines, while the third embodiment incorporates a hard mask stack over the interconnect metal lines, enhancing the overall performance of the semiconductor devices.
Career Highlights
Jane C M Hui is associated with Chartered Semiconductor Manufacturing Ltd, where he has made significant contributions to the field of semiconductor manufacturing. His expertise in low dielectric constant materials has positioned him as a key player in advancing integrated circuit technology.
Collaborations
Throughout his career, Jane C M Hui has collaborated with esteemed colleagues such as Yi Liang Xu and Jia Zhen Zheng. These collaborations have further enriched his research and development efforts in semiconductor technology.
Conclusion
Jane C M Hui's innovative work in semiconductor technology, particularly his patent on gap filling processes, showcases his commitment to enhancing the efficiency and stability of integrated circuits. His contributions continue to influence the field and pave the way for future advancements.