Jan C Terry

Title: Jan C. Terry: Innovator in Charged Particle Beam Technology

Introduction

Jan C. Terry is a notable inventor based in Palo Alto, California. She has made significant contributions to the field of charged particle beam technology. Her innovative work has led to the development of a unique patent that enhances the precision of integrated circuit pattern writing.

Latest Patents

Jan C. Terry holds a patent for a "Reregistration system for a charged particle beam exposure system." This invention focuses on determining and positioning the location of a substrate target surface concerning multiple charged particle beams. The system allows for simultaneous writing of integrated circuit patterns at various locations on the substrate. Reregistration is achieved by scanning two or more charged particle beams over corresponding fiducial marks on the substrate. These marks may consist of materials with a high atomic number or predefined topographical features. The scattered electrons from these marks are detected and converted into electrical signals, which help determine the substrate's location.

Career Highlights

Throughout her career, Jan has demonstrated exceptional expertise in her field. Her work at Veeco Instruments Inc. has positioned her as a leader in the development of advanced technologies for semiconductor manufacturing. She has been instrumental in driving innovation and improving the efficiency of charged particle beam systems.

Collaborations

Jan C. Terry has collaborated with esteemed colleagues, including Eugene R. Westerberg and Donald R. Cone. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and advancements in technology.

Conclusion

Jan C. Terry's contributions to charged particle beam technology exemplify her innovative spirit and dedication to advancing the field. Her patent and collaborative efforts continue to influence the semiconductor industry positively.