The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 1983
Filed:
Mar. 03, 1981
Eugene R Westerberg, Palo Alto, CA (US);
Donald R Cone, Palo Alto, CA (US);
Julius J Muray, Los Altos, CA (US);
Jan C Terry, Palo Alto, CA (US);
Veeco Instruments Incorporated, Melville, NY (US);
Abstract
A reregistration system for determining and positioning the location of a substrate target surface with respect to a plurality of charged particle beams used to directly write an integrated circuit pattern simultaneously at a plurality of locations on the substrate is disclosed. Reregistration is accomplished by scanning two or more of the charged particle beams over a corresponding number of reregistration fiducial marks on the substrate. The reregistration marks may consist of a material having a high atomic number or predefined topographical features. Electrons scattered from these marks are detected and converted to electrical signals. The temporal relationship between the scanning beams and the resultant electrical signals may then be used to determine substrate location.