Location History:
- Campbell, CA (US) (1994)
- Austin, TX (US) (1995)
Company Filing History:
Years Active: 1994-1995
Title: Innovations of James F. Roberts in Semiconductor Technology
Introduction
James F. Roberts is a notable inventor based in Campbell, CA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on enhancing the efficiency and effectiveness of semiconductor wafer processing.
Latest Patents
One of his latest patents is the "Compound clamp ring for semiconductor wafers." This invention secures a semiconductor wafer with a flat portion to a wafer pedestal during processing. It maintains a continuous seal between the wafer edges and the pedestal, preventing leakage of coolant gases. The clamp ring features an annular wafer clamp surface that presses the round portion of the wafer into sealing abutment with the pedestal. Additionally, it includes a cavity that securely receives a comb-like array of resilient flexures, which apply a yieldable bias to the flat portion of the wafer, completing the seal.
Another significant patent is the "Clamping ring and susceptor therefor." This clamping ring has a downwardly extending finger that mates with a pocket in the periphery of a susceptor, supporting a wafer in a chemical vapor deposition chamber. It ensures alignment of the clamping ring, wafer, and susceptor. A source of inert gas connected to the pocket provides positive pressure, preventing reactive gas from reaching the wafer's edge and backside. The design also includes a vacuum source connected to the susceptor support surface, ensuring good contact between the wafer and the susceptor.
Career Highlights
James F. Roberts is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His innovative work has contributed to advancements in wafer processing technologies, making significant impacts in the field.
Collaborations
Throughout his career, James has collaborated with notable coworkers such as Semyon Sherstinsky and Charles C. Harris. These collaborations have fostered an environment of innovation and creativity, leading to the development of groundbreaking technologies.
Conclusion
James F. Roberts is a distinguished inventor whose contributions to semiconductor technology have been invaluable. His patents reflect a commitment to improving wafer processing methods, showcasing his expertise and innovative spirit.
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