This inventor holds 1 USPTO granted patent. Top assignee: Novellus Systems Incorporated. Active years: 2008.
Company Filing History:
Years Active: 2008
Title: James Ekberg - Innovator in CMP Apparatus Technology
Introduction
James Ekberg is a notable inventor based in Tempe, AZ (US). He has made significant contributions to the field of semiconductor manufacturing through his innovative designs and mechanisms. His work primarily focuses on improving the efficiency and functionality of chemical mechanical polishing (CMP) apparatus.
Latest Patents
James Ekberg holds a patent for a CMP apparatus and load cup mechanism. This invention provides a load cup mechanism designed for loading and unloading workpieces in CMP apparatus. The mechanism features a load cup arm that pivots between a load position and an off-load position. It includes a workpiece platform equipped with lift fingers and guide fingers to support and center the workpiece. Additionally, guide posts are strategically placed around the platform to ensure proper alignment with the processing apparatus.
Career Highlights
Throughout his career, James has been associated with Novellus Systems Incorporated, a company known for its advanced semiconductor manufacturing equipment. His work at Novellus has allowed him to contribute to the development of cutting-edge technologies in the industry.
Collaborations
James has collaborated with several talented individuals, including John F. Stumpf and James Jed Crawford. These collaborations have fostered innovation and have led to advancements in CMP technology.
Conclusion
James Ekberg's contributions to CMP apparatus technology highlight his role as an influential inventor in the semiconductor industry. His innovative designs continue to impact the efficiency of manufacturing processes.