The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2008
Filed:
Apr. 09, 2004
David T. Marquardt, Phoenix, AZ (US);
Joe E. Koeth, Chandler, AZ (US);
James Jed Crawford, Chandler, AZ (US);
James Ekberg, Tempe, AZ (US);
Antoni F. Jakubiec, San Jose, CA (US);
Michael D. Smigel, Phoenix, AZ (US);
John F. Stumpf, Phoenix, AZ (US);
David T. Marquardt, Phoenix, AZ (US);
Joe E. Koeth, Chandler, AZ (US);
James Jed Crawford, Chandler, AZ (US);
James Ekberg, Tempe, AZ (US);
Antoni F. Jakubiec, San Jose, CA (US);
Michael D. Smigel, Phoenix, AZ (US);
John F. Stumpf, Phoenix, AZ (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
In accordance with one embodiment of the invention, a load cup mechanism is provided for loading and unloading apparatus such as a CMP apparatus. The load cup mechanism, configured to load a work piece into and to unload a work piece from the apparatus, comprises a load cup arm configured to pivot about an axis between a load position aligned with the apparatus and an off-load position. A work piece platform is coupled to an end of the load cup arm and a plurality of lift fingers and a plurality of guide fingers, configured to support and center a work piece, are spaced about the work piece platform. A plurality of guide posts are spaced apart about the periphery of the work piece platform and are configured to align the work piece platform, in the load position, to the processing apparatus.