Company Filing History:
Years Active: 1999-2001
Title: Innovations by James E. Currie: Pioneering Planarization Compositions
Introduction
James E. Currie is a notable inventor hailing from Dover Plains, NY, who has made significant contributions to the field of semiconductor manufacturing. With a total of three patents, Currie's work primarily focuses on enhancing the efficiency and effectiveness of planarization processes in semiconductor devices.
Latest Patents
Currie’s latest patents showcase his expertise in developing advanced planarization compositions. One of his prominent inventions is titled "Planarization compositions and methods for removing interlayer dielectric films." This patent details a composition designed for chemical mechanical planarization of dielectric layers used in semiconductor manufacturing. The composition contains spherical silica particles with an average diameter ranging from 30 nm to about 400 nm and is carefully formulated to ensure 90% of particles fall within 20% of the average diameter.
Additionally, it includes a liquid carrier with up to 9% alcohol and an amine hydroxide, maintaining a pH level between 9 and 11.5. This innovative solution aims to effectively thin, polish, and planarize interlayer dielectric thin films, shallow trench isolation structures, and isolation of gate structures.
Furthermore, Currie's patent for a "Planarization composition for removing metal films" focuses on compositions with spherical silica particles that exhibit a weight average particle diameter between 0.03µm to about 2µm. The liquid carrier comprises up to 20% ROH and includes stabilizing agents to adjust pH levels, showcasing Currie's advancements in thinning, polishing, and planarizing techniques.
Career Highlights
James E. Currie works at Advanced Technology Materials, Inc., where he continues to drive innovation in semiconductor manufacturing technologies. His career reflects a commitment to improving production processes and incorporating novel materials for enhanced performance.
Collaborations
Throughout his career, Currie has collaborated with accomplished professionals, including coworkers Thomas J. Grebinski and Michael Jones. These partnerships underscore the importance of teamwork and collaboration in advancing technology and driving innovations in the field.
Conclusion
James E. Currie's contributions to semiconductor manufacturing through his innovative planarization compositions have the potential to significantly impact the industry. With his expertise and continued research, Currie remains a key figure in the field of semiconductor device fabrication, pushing the boundaries of technology and materials science.