Location History:
- Santa Clara, CA (US) (2011 - 2013)
- Kalispell, MO (US) (2017)
Company Filing History:
Years Active: 2011-2017
Title: The Innovative Contributions of James D. Felsch
Introduction
James D. Felsch is a notable inventor based in Santa Clara, California. He has made significant contributions to the field of chemical vapor deposition technology. With a total of three patents to his name, Felsch has demonstrated a commitment to advancing innovation in his area of expertise.
Latest Patents
One of Felsch's latest patents is the Multi-gas straight channel showerhead. This invention provides a method and apparatus that can be utilized for chemical vapor deposition and/or hydride vapor phase epitaxial (HVPE) deposition. In one embodiment, a metal organic chemical vapor deposition (MOCVD) process is employed to deposit a Group III-nitride film on multiple substrates. The invention involves delivering a Group III precursor, such as trimethyl gallium, trimethyl aluminum, or trimethyl indium, along with a nitrogen-containing precursor, such as ammonia, to a series of straight channels that isolate the precursor gases. These gases are then injected into mixing channels where they are combined before entering a processing volume containing the substrates. Additionally, heat exchanging channels are incorporated for temperature control of the mixing channels to prevent undesirable condensation and reactions of the precursors.
Career Highlights
Felsch is currently associated with Applied Materials, Inc., a leading company in the semiconductor and display industries. His work at Applied Materials has allowed him to contribute to cutting-edge technologies that enhance manufacturing processes.
Collaborations
Throughout his career, Felsch has collaborated with talented individuals such as Brian Hayes Burrows and Alexander Tam. These collaborations have likely enriched his work and contributed to the innovative solutions he has developed.
Conclusion
James D. Felsch's contributions to the field of chemical vapor deposition technology exemplify his innovative spirit and dedication to advancing the industry. His patents and work at Applied Materials, Inc. highlight his role as a significant inventor in this specialized field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.