James D Bernstein

Title: **James D. Bernstein: Innovator in Plasma Immersion Ion Implantation**

Introduction

James D. Bernstein, an esteemed inventor based in Beverly, MA, has made significant contributions to the field of plasma immersion ion implantation. With a record of five patents, his innovative techniques and systems have enhanced the efficiency and precision of various implantation processes.

Latest Patents

Bernstein's latest patents showcase his expertise in developing advanced methods for plasma immersion ion implantation. One notable invention is a **pretreatment process for plasma immersion ion implantation**, which involves ionizing gases to produce electrically inactive ions that interact with patterned photoresist. This method effectively manages outgassing, ensuring optimal conditions during the implantation process. Furthermore, he outlined a method for curing the photoresist, which hardens it prior to ion implantation while minimizing potential disruptions caused by outgassing.

Another important patent pertains to a **system for improving energy purity and implant consistency**. This invention introduces a plasma immersion ion implantation method that utilizes a voltage modulator to maintain uniform energy distribution during implantation. By controlling voltage signals and grounding procedures, Bernstein's system reduces charge accumulation and enhances the reliability of results throughout the implantation process.

Career Highlights

Throughout his career, James D. Bernstein has worked with prominent companies in the technology sector, including Axcelis Technologies, Inc. and Eaton Corporation. His role in these organizations has enabled him to apply and refine his methods, driving innovation in the field of semiconductor processing.

Collaborations

Bernstein's work has also seen collaboration with notable professionals, including Peter Lawrence Kellerman and Brian S. Freer. These partnerships have contributed to the development of pioneering techniques in plasma implantation processes, showcasing the value of teamwork in advancing technology.

Conclusion

James D. Bernstein's prolific contributions to plasma immersion ion implantation highlight his status as a leading innovator in the field. His patents not only reflect his deep understanding of ion implantation processes but also lead to enhanced practices within the industry. Through his dedication to innovation and collaboration with esteemed colleagues, Bernstein continues to shape the future of technological advancement in semiconductor manufacturing.