Company Filing History:
Years Active: 1977-2002
Title: Innovations by James C Wing
Introduction
James C Wing is a notable inventor based in Los Altos, CA. He holds a total of 7 patents that showcase his contributions to the field of technology and engineering. His work primarily focuses on advancements in semiconductor processing and gas injection techniques.
Latest Patents
One of his latest patents is titled "Situ plasma clean gas injection." This invention involves a processing chamber equipped with a showerhead and a chuck, which is cleaned using a gaseous cleaning agent injected through an aperture in the chuck. The design allows for the cleaning agent to pass through the showerhead, ensuring that both the processing chamber and the showerhead are effectively cleaned. By applying a radio frequency power supply, the gaseous cleaning agent forms a plasma that continuously flows through the chamber, enhancing the cleaning process.
Another significant patent is "Exclusion of polymer film from semiconductor wafer edge and backside during film (CVD) deposition." This invention provides a structure and method to prevent polymer film deposition on the backside and edge of a wafer during chemical vapor deposition (CVD) processing. An electrostatic chuck secures the wafer while an inert gas flows outward from channels on its surface, preventing monomer molecules from depositing on the wafer's backside. The design also includes a showerhead positioned to redirect monomer molecules, ensuring that they do not deposit on the wafer edge.
Career Highlights
James C Wing has worked with several prominent companies throughout his career, including Novellus Systems Incorporated and Syntex (U.S.A.) Inc. His experience in these organizations has contributed to his expertise in semiconductor technology and innovation.
Collaborations
Throughout his career, James has collaborated with notable individuals such as Thomas J Cleary and Edward J McInerney. These collaborations have likely enriched his work and led to further advancements in his field.
Conclusion
James C Wing's contributions to the field of semiconductor processing through his innovative patents demonstrate his significant impact on technology. His work continues to influence advancements in the industry, showcasing the importance of innovation in engineering.