The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2000
Filed:
Mar. 16, 1998
James Wing, Los Altos, CA (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
An apparatus for vaporizing Parylene AF dimer powder includes a vaporizer having a housing, a cooling coil surrounding the housing and an isolation valve coupled to an outlet end of the housing. During use, the vaporizer and a valve and manifold assembly coupled to the vaporizer are heated by an oven. The Parylene AF dimer powder inside of the vaporizer is initially maintained below its sublimation temperature by flowing a cooling fluid through the cooling coil while the oven heats up. After the oven and valve and manifold assembly reach the operating temperature, the cooling fluid flow is decreased and correspondingly the vaporizer temperature increased thus producing Parylene AF4 dimer vapor.