James A Grootegoed

Title: The Innovations of James A. Grootegoed

Introduction

James A. Grootegoed, hailing from Chandler, AZ, is an accomplished inventor with a notable contribution to the field of semiconductor processing. Holding three patents, Grootegoed's work focuses on enhancing the efficiency of semiconductor wafer preparation and material removal processes.

Latest Patents

Grootegoed's latest patents include an innovative wafer carrier and a method of material removal from a semiconductor wafer. This advanced wafer carrier is designed for a chemical mechanical polishing (CMP) tool, featuring an adjustable mechanism that enables both center fast and edge fast material removal. Uniquely, it holds the semiconductor wafer without vacuum, utilizing a carrier ring to secure it in place. The elastically flexed wafer support structure can be bowed outward or inward in various contours, allowing the semiconductor wafer to conform during a polishing process. This adaptability is critical for producing different material removal rates across the wafer's radius, ultimately enhancing wafer planarity.

Another significant patent involves a point of use dilution tool and method that prepares solutions by mixing two fluids in a filter to create the desired composition. The system utilizes sealless pumps driven by a common motor to maintain a constant ratio of flow rates, all while adapting the solution flow rate as needed. Additionally, the conductivity or resistivity of the solution is monitored with a measurement device to ensure accurate concentration levels.

Career Highlights

James A. Grootegoed is affiliated with Motorola Corporation, a global leader in telecommunications and semiconductor technology. His role within the company has allowed him to bring innovative ideas to life, contributing significantly to advancements in semiconductor manufacturing processes.

Collaborations

Throughout his career, Grootegoed has collaborated with esteemed colleagues such as James F. Vanell and Laura John. Together, they have forged a path of innovation in semiconductor technology, sharing insights and expertise to push the boundaries of what is currently possible in the industry.

Conclusion

James A. Grootegoed stands out as a significant figure in the realm of semiconductor innovation. His patents reflect a deep understanding of the intricacies involved in semiconductor wafer processing and demonstrate a commitment to improving industry standards. As he continues his work at Motorola Corporation, it will be exciting to witness further advancements from this talented inventor.