Ivelin A Anguelov

Title: Ivelin A Anguelov: Innovator in Wafer Measurement Technology

Introduction

Ivelin A Anguelov is a notable inventor based in Sunnyvale, California. He has made significant contributions to the field of wafer measurement technology. His innovative approach has led to the development of a unique apparatus that enhances the efficiency of measuring film thickness properties of wafers.

Latest Patents

Ivelin A Anguelov holds a patent for a "Bathless wafer measurement apparatus and method." This invention provides a solution for measuring a film thickness property of a wafer without the need for a water bath or complex wafer handling apparatus. The apparatus features a chuck with an upper surface designed to support the wafer, along with a metrology module that measures one or more film thickness properties. The design includes a measurement window arranged parallel to the chuck upper surface, defining an open volume. Additionally, a water supply system is integrated to facilitate the flow of water through the volume without producing bubbles, ensuring accurate measurements.

Career Highlights

Ivelin A Anguelov is currently associated with Sensys Instruments Corporation, where he continues to innovate in the field of wafer measurement. His work has been instrumental in advancing measurement techniques that are crucial for various applications in semiconductor manufacturing.

Collaborations

Ivelin has collaborated with notable colleagues such as Michael Weber-Grabau and Edric Tong. Their combined expertise contributes to the innovative environment at Sensys Instruments Corporation.

Conclusion

Ivelin A Anguelov's contributions to wafer measurement technology exemplify the spirit of innovation in the field. His patent for a bathless wafer measurement apparatus showcases his commitment to improving measurement techniques in semiconductor applications.