Company Filing History:
Years Active: 2016
Title: Inna Turevsky: Innovator in UV Chamber Cleaning Technologies
Introduction
Inna Turevsky is a prominent inventor based in Santa Clara, CA (US). She has made significant contributions to the field of cleaning technologies for UV chambers. With a total of 2 patents, her work focuses on enhancing the efficiency and effectiveness of cleaning processes in semiconductor manufacturing.
Latest Patents
Inna's latest patents include a method and hardware for cleaning UV chambers. This innovative cleaning method involves the use of a first cleaning gas, a second cleaning gas, and a purge gas introduced through openings in the chamber. The first cleaning gas is an oxygen-containing gas, such as ozone, which effectively removes carbon residues. The second cleaning gas is a remote plasma of NF and O, designed to eliminate silicon residues. The UV chamber is equipped with two UV transparent showerheads, along with a UV window in the chamber lid, which together define a gas volume near the UV window and a distribution volume below it. A purge gas is flowed through the gas volume while one or more cleaning gases are introduced into the distribution volume, preventing the cleaning gases from contacting the UV transparent window.
Career Highlights
Inna Turevsky is currently employed at Applied Materials, Inc., where she continues to develop innovative solutions in the field of semiconductor manufacturing. Her expertise in cleaning technologies has positioned her as a key contributor to advancements in this area.
Collaborations
Inna has collaborated with notable colleagues, including Sanjeev Baluja and Alexandros T Demos, to further enhance the effectiveness of her inventions.
Conclusion
Inna Turevsky's contributions to UV chamber cleaning technologies demonstrate her commitment to innovation and excellence in the semiconductor industry. Her patents reflect a deep understanding of the challenges faced in manufacturing processes, and her work continues to pave the way for advancements in this critical field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.