This inventor holds 2 USPTO granted patents and 2 published patent applications. Top assignee: Semes Co., Ltd.. Active years: 2023.
Company Filing History:
Years Active: 2023
Title: Inhwang Park: Innovator in Substrate Treatment Technologies
Introduction
Inhwang Park is a notable inventor based in Suwon-si, South Korea. He has made significant contributions to the field of substrate treatment technologies, holding a total of 2 patents. His work focuses on developing advanced apparatuses that enhance the efficiency and effectiveness of substrate processing.
Latest Patents
Inhwang Park's latest patents include innovative designs for a fluid supply unit and a substrate treating apparatus. The fluid supply unit is designed to supply fluid to a treatment space within a process chamber. It features a supply pipe, a pump for providing flow pressure, a vent line for discharging pressure, a relief valve, and a reservoir with a larger cross-sectional area than the supply pipe. This design ensures optimal fluid management during substrate treatment.
The substrate support unit, another of his recent inventions, includes a rotatable spin head that supports the substrate. It is equipped with a hollow shaft that transmits torque to the spin head, a nozzle assembly for supplying treatment liquid, and a sealing member that utilizes magnetic fluid to seal the gap between the spin head and the nozzle assembly. These innovations contribute to more effective substrate treatment processes.
Career Highlights
Inhwang Park is currently employed at Semes Co., Ltd., where he continues to develop cutting-edge technologies in substrate treatment. His work has positioned him as a key figure in the industry, contributing to advancements that improve manufacturing processes.
Collaborations
Inhwang Park collaborates with talented individuals such as Gui Su Park and Young Hun Lee. Their combined expertise fosters an environment of innovation and creativity, leading to the development of groundbreaking technologies.
Conclusion
Inhwang Park's contributions to substrate treatment technologies through his patents and collaborations highlight his role as an influential inventor in the field. His work continues to pave the way for advancements in manufacturing processes.