The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2023
Filed:
Jun. 19, 2020
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Inhwang Park, Suwon-si, KR;
Gui Su Park, Cheonan-si, KR;
Young Hun Lee, Cheonan-si, KR;
Youngseop Choi, Cheonan-si, KR;
Seung Hoon Oh, Cheonan-si, KR;
Jonghyeon Woo, Asan-si, KR;
Jin Mo Jae, Geoje-si, KR;
Assignee:
SEMES CO., LTD., Chungcheongnam-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); B08B 3/04 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68785 (2013.01); B08B 3/04 (2013.01); H01L 21/67051 (2013.01); H01L 21/67126 (2013.01); H01L 21/68792 (2013.01);
Abstract
An apparatus for supporting a substrate includes a rotatable spin head that supports the substrate, a hollow shaft that is connected with the spin head and that transmits torque to the spin head, a nozzle assembly that is disposed in an interior space of the spin head so as not to rotate and that supplies a treatment liquid to a backside of the substrate, and a sealing member that seals a gap between the spin head and the nozzle assembly using a magnetic fluid.