In-sung Kim

Title: In-sung Kim: Semiconductor Manufacturing and Lithography Innovations.

Introduction

In-sung Kim is an inventor based in Seoul, South Korea, whose patent work focuses on semiconductor manufacturing and lithography. He is associated with Samsung Electronics Co., Ltd. Kim is credited with 4 patents.

Latest Patents

One of Kim’s latest patents, “Method of Manufacturing a Semiconductor Device,” describes a process for monitoring photoresist exposure. The method measures exposure intensity across photoresist layers, compares the measurements, and uses the resulting information when exposing another layer on a semiconductor substrate. It also describes an out-of-band extreme ultraviolet light-eliminating layer on the second photoresist layer.

Another patent, “Phase Shifting Mask for Manufacturing Semiconductor Device and Method of Fabricating the Same,” concerns a phase-shifting mask with a transparent substrate, a main pattern, and at least one nearby assistant pattern. The patterns are designed to provide phase shifting by the same degree, while their optical transmittances differ.

Career Highlights

Kim’s listed inventions address challenges in semiconductor fabrication, including exposure control and mask design. These technologies relate to the precision and process consistency required in advanced device manufacturing.

Collaborations

Kim’s listed coworkers include Jung-hyeon Lee and Sung-Gon Jung. His work is associated with Samsung Electronics Co., Ltd.

Conclusion

In-sung Kim’s patent portfolio reflects contributions to semiconductor manufacturing, particularly photoresist exposure methods and phase-shifting mask technology.