This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Lam Research Corporation. Active years: 2012-2017.
Location History:
- Kyeonnggi, KR (2012)
- San Ramon, CA (US) (2017)
Company Filing History:
Years Active: 2012-2017
Title: In Deog Bae: Innovator in Plasma Processing Technologies
Introduction
In Deog Bae is a notable inventor based in San Ramon, CA (US). He has made significant contributions to the field of plasma processing, holding 2 patents that showcase his innovative approaches to substrate processing.
Latest Patents
One of his latest patents is titled "Method for forming stair-step structures." This patent describes a method for creating a stair-step structure in a substrate within a plasma processing chamber. The process involves forming an organic mask over the substrate, trimming it with a vertical to lateral ratio of less than 0.8, and cyclically repeating the steps of trimming and etching the substrate. Another significant patent is "Selective etch of high-k dielectric material." This invention provides a method for selectively etching a high-k dielectric layer with respect to a polysilicon material. The process includes partially removing the high-k dielectric layer by Ar sputtering and then etching it using an etching gas comprising BCl.
Career Highlights
In Deog Bae is currently employed at Lam Research Corporation, where he continues to develop innovative technologies in the field of semiconductor manufacturing. His work has contributed to advancements in plasma processing techniques, enhancing the efficiency and effectiveness of substrate treatments.
Collaborations
In his career, In Deog Bae has collaborated with talented individuals such as Qian Fu and Wonchul Lee. These collaborations have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
In Deog Bae's contributions to plasma processing technologies through his patents and work at Lam Research Corporation highlight his role as a key innovator in the field. His ongoing efforts continue to push the boundaries of what is possible in semiconductor manufacturing.