Company Filing History:
Years Active: 2015-2017
Title: Ilwoong Koo: Innovator in Plasma Technology
Introduction
Ilwoong Koo is a notable inventor based in North Andover, MA (US). He has made significant contributions to the field of semiconductor equipment, particularly in plasma technology. With a total of 2 patents to his name, Koo's work focuses on enhancing the efficiency and effectiveness of plasma systems used in semiconductor manufacturing.
Latest Patents
Koo's latest patents include a method for implementing low dose implants in a plasma system. This invention discloses methods for decreasing the dose per pulse implanted into a workpiece within a process chamber. One embodiment involves generating plasma using an RF power supply that operates in two modes: continuous wave mode and pulsed plasma mode. The continuous wave mode allows for the creation of plasma, while the pulsed plasma mode outputs two different power levels, which helps in reducing dopant deposition on the wafer. Additionally, Koo has developed techniques for clamping and declamping a substrate, which involve using electrodes that are electrically biased to electrostatically clamp the wafer to the platen. This innovation aims to minimize the likelihood of the wafer sticking during the removal process.
Career Highlights
Ilwoong Koo is currently employed at Varian Semiconductor Equipment Associates, Inc., where he continues to advance his research and development efforts in semiconductor technology. His work has been instrumental in improving processes that are critical to the manufacturing of semiconductor devices.
Collaborations
Koo has collaborated with several talented individuals in his field, including Jun Seok Lee and Aseem Kumar Srivastava. These collaborations have fostered innovation and have contributed to the success of various projects within the semiconductor industry.
Conclusion
Ilwoong Koo's contributions to plasma technology and semiconductor manufacturing are noteworthy. His innovative patents and collaborative efforts highlight his commitment to advancing the field. Koo's work continues to influence the industry, paving the way for future advancements in semiconductor technology.