Andover, MA, United States of America

Il-Woong Koo


Average Co-Inventor Count = 4.4

ph-index = 1

Forward Citations = 1(Granted Patents)


Location History:

  • Andover, MA (US) (2021 - 2023)
  • North Andover, MA (US) (2021 - 2024)

Company Filing History:


Years Active: 2021-2024

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4 patents (USPTO):

Title: The Innovative Mind of Il-Woong Koo: A Leader in Semiconductor Fabrication

Introduction: Il-Woong Koo is an accomplished inventor based in Andover, MA. With a remarkable record of four patents to his name, he has significantly contributed to advancements in semiconductor technology. His innovative methodologies aim to improve the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents: Among his latest patents, two standout inventions highlight his expertise in the field:

1. **Directional modification of patterning structure to enhance pattern elongation process margin**: This patent introduces a method for patterning structures, which includes a process that utilizes a layer stack containing device layers and a hardmask layer. Through detailed sputter etching, this method enhances the slope of the trenches' lateral sidewalls, thereby improving the manufacturing process of semiconductor devices.

2. **Phosphorus fugitive emission control**: This innovative approach focuses on processing and passivating implanted workpieces to control fugitive emissions of dopants like phosphorus. By employing sputtering and chemical etching processes, the patent effectively reduces the concentration of toxic dopants at the surface, thus ensuring safer and more efficient semiconductor production.

Career Highlights: Il-Woong Koo is currently employed at Applied Materials, Inc., a leading company in the field of semiconductor equipment. His work there emphasizes both innovation and practical application of patents, contributing to the company's standing as a pioneer in technological advancements.

Collaborations: Throughout his career, Koo has collaborated with talented colleagues such as Cuiyang Wang and Jun Seok Lee. Together, they have worked on various projects that merge their expertise to drive forward the capabilities of semiconductor fabrication.

Conclusion: Il-Woong Koo exemplifies the qualities of an innovative inventor, with a clear impact on the future of semiconductor technology. His patents not only showcase his inventive spirit but also contribute to the broader advancements within the industry, marking him as a valuable asset in the realm of innovation.

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