Hyunjay Kang

Title: Innovations by Hyunjay Kang in Semiconductor Technology

Introduction

Hyunjay Kang is a notable inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patent related to overlay correction methods.

Latest Patents

Hyunjay Kang holds a patent for an overlay correction method, a method of evaluating overlay correction operations, and a method of fabricating semiconductor devices using the overlay correction method. This patent discloses a process that includes measuring the overlay between center lines of lower and upper patterns on a wafer. The method involves fitting each component of the overlay with a polynomial function to obtain first fitting quantities, which are then summed to construct a correction model. The components of the overlay are measured in two different directions parallel to the top surface of a reticle. The highest order of the polynomial function is determined to minimize the difference between the polynomial function and each of the overlay components.

Career Highlights

Hyunjay Kang is currently employed at Samsung Electronics Co., Ltd., where he continues to advance his research and development efforts in semiconductor technology. His work has been instrumental in improving the accuracy and efficiency of semiconductor fabrication processes.

Collaborations

Hyunjay collaborates with talented colleagues, including Chorong Park and Doogyu Lee, who contribute to the innovative environment at Samsung Electronics.

Conclusion

Hyunjay Kang's contributions to semiconductor technology through his innovative patent demonstrate his expertise and commitment to advancing the field. His work continues to influence the development of more efficient semiconductor devices.