This inventor holds 1 USPTO granted patent. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2018.
Company Filing History:
Years Active: 2018
Title: Hyun-Hoon Lee: Innovator in Liquid Leakage Sensing Technology
Introduction
Hyun-Hoon Lee is a notable inventor based in Hwaseong, South Korea. He has made significant contributions to the field of lithography apparatus through his innovative patent. His work focuses on enhancing the reliability and efficiency of extreme ultraviolet (EUV) light generating apparatus.
Latest Patents
Hyun-Hoon Lee holds a patent for an "Apparatus and method of sensing liquid leakage for lithography apparatus." This invention aims to prevent contamination of the collector mirror by detecting leakage of cooling water supplied to it. The liquid leakage sensing apparatus comprises a collector mirror module, a cooling unit that supplies cooling water, a gas supply unit for water-soluble gas, and a sensing unit to detect any leaked gas.
Career Highlights
Hyun-Hoon Lee is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in the field of semiconductor manufacturing technologies. His expertise in liquid leakage sensing has positioned him as a valuable asset to his team and the company.
Collaborations
He has collaborated with notable colleagues, including Jin-Pyoung Kim and Jae-Pil Lee, who share a commitment to advancing technology in their respective fields.
Conclusion
Hyun-Hoon Lee's contributions to liquid leakage sensing technology exemplify his dedication to innovation in the semiconductor industry. His patent not only addresses critical issues in lithography apparatus but also showcases the importance of collaboration in technological advancements.