Company Filing History:
Years Active: 2015-2017
Title: Hyo Seok Yang: Innovator in Plasma Reactor Technology
Introduction
Hyo Seok Yang is a notable inventor based in Cupertino, California, recognized for his contributions to plasma reactor technology. With a total of three patents to his name, Yang has made significant advancements in the field, particularly in shielding substrates from undesirable irradiation.
Latest Patents
One of Yang's latest patents involves a plasma reactor with a conductive member in the reaction chamber. This innovative design places a conductive member between the plasma chamber in a remote plasma reactor and the substrate. The purpose of this conductive member is to shield the substrate from undesirable electromagnetic radiation, ions, or electrons. The conductive member effectively blocks electromagnetic radiation, neutralizes ions, and absorbs electrons. Despite its placement, radicals generated in the plasma chambers still flow to the substrate. This ensures that the substrate is exposed to the beneficial radicals while minimizing or eliminating damage caused by electromagnetic radiation, ions, or electrons.
Career Highlights
Hyo Seok Yang has established himself as a key figure in the field of plasma technology. His work at Veeco Ald Inc. has allowed him to focus on innovative solutions that enhance the performance and reliability of plasma reactors. His patents reflect a deep understanding of the complexities involved in plasma interactions and substrate protection.
Collaborations
Yang has collaborated with several talented individuals in his field, including Sang In Lee and Ilsong Lee. These collaborations have contributed to the development of cutting-edge technologies and have fostered a creative environment for innovation.
Conclusion
Hyo Seok Yang's contributions to plasma reactor technology demonstrate his commitment to advancing the field through innovative solutions. His patents not only showcase his technical expertise but also highlight the importance of collaboration in driving technological progress.