Company Filing History:
Years Active: 2020-2024
Title: Innovations of Hwanseok Seo in Semiconductor Technology
Introduction
Hwanseok Seo is a prominent inventor based in Suwon-si, South Korea, known for his significant contributions to the field of semiconductor technology. With a remarkable portfolio of five patents, his innovative work primarily revolves around phase shift masks utilized in extreme ultraviolet lithography, a crucial process in modern semiconductor manufacturing.
Latest Patents
Seo's latest inventions include a phase shift mask designed for extreme ultraviolet lithography and a method to manufacture semiconductor devices using this advanced technology. His first patent describes the construction of a phase shift mask consisting of a substrate, a reflective layer, a capping layer, and a buffer pattern with an opening that exposes the surface of the capping layer. Notably, the absorber pattern integrated into the buffer pattern possesses a refractive index lower than that of the buffer pattern with a greater thickness, enhancing the mask's functionality.
Furthermore, he has developed an advanced design for phase shift masks that includes phase shift patterns on the capping layer. Each pattern is intricately composed of a lower absorption pattern and an upper absorption pattern, with varying refractive indices and thicknesses, contributing to the precision of the lithography process.
Career Highlights
Hwanseok Seo's career is significantly tied to his role at Samsung Electronics Co., Ltd., where he leverages his expertise to spearhead developments in semiconductor technology. His work has not only enhanced production techniques but has also paved the way for innovations that drive the semiconductor industry forward.
Collaborations
In his professional journey, Seo has collaborated with talented peers, including SeongSue Kim and Taehoon Lee. This teamwork amplifies the innovative environment at Samsung Electronics, fostering an atmosphere where groundbreaking ideas flourish.
Conclusion
Hwanseok Seo exemplifies the spirit of innovation in semiconductor technology. His patents not only reflect his individual genius but also contribute immensely to the collective advancements within the field. As the industry continues to evolve, inventors like Seo play a vital role in shaping the future of technology and manufacturing processes.