Hwajun Noh

Title: **Innovative Contributions of Hwajun Noh**

Introduction

Hwajun Noh is a notable inventor based in Nirasaki, Japan, recognized for his innovative work in the field of substrate holders and film forming apparatuses. His contributions to technology have garnered attention within the semiconductor manufacturing industry, specifically through his unique design that enhances the efficiency of substrate handling.

Latest Patents

Hwajun Noh holds one patent titled "Substrate holder and film forming apparatus." This invention features a substrate holder comprising a stage made of dielectric material designed to support a substrate. The apparatus includes an attraction electrode that electrostatically attracts the substrate using a DC voltage applied to the electrode, implementing the Johnsen-Rahbek force. Additionally, the design incorporates a heater to maintain optimal temperature during operation. The substrate holder includes a close contact area for substrate placement and a specialized groove for the accumulation of conductive deposition film, significantly improving film formation processes.

Career Highlights

Hwajun Noh has made significant strides in his career at Tokyo Electron Limited, a leader in the semiconductor production equipment industry. His contributions emphasize innovation in equipment design, focusing on enhancing the performance and reliability of manufacturing processes. His expertise in dielectric materials and electrostatic forces positions him as a key player in advancing the technologies used in substrate holders.

Collaborations

Throughout his career, Hwajun Noh has collaborated with colleagues such as Toshiaki Fujisato and Takashi Mochizuki. Working closely with these professionals, he has been able to share insights and develop ideas that drive forward their common goals in technology development and innovation.

Conclusion

Hwajun Noh's work exemplifies the ingenuity characteristic of pioneering inventors in the semiconductor industry. His patent on the substrate holder and film forming apparatus not only showcases his individual talent but also reflects the collaborative spirit he shares with his colleagues at Tokyo Electron Limited. The advancements stemming from his inventions continue to influence the efficiency and effectiveness of semiconductor manufacturing processes.