Hung Pin Lu

Title: Innovations by Inventor Hung Pin Lu

Introduction

Hung Pin Lu is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on enhancing the efficiency and effectiveness of semiconductor devices.

Latest Patents

Hung Pin Lu's latest patents include innovative methods for forming conductive structures in semiconductor devices. One of his patents describes a process using a titanium precursor to selectively form a titanium silicide (TiSi) layer. This method involves a plasma-based deposition operation that allows silicon to diffuse to the top surface of a transistor structure, resulting in a silicon-rich surface. This innovation increases the selectivity of titanium silicide formation compared to other materials in the semiconductor device. The titanium precursor reacts with this silicon-rich surface to create the titanium silicide layer, which is crucial for the device's performance.

Another patent focuses on methods for forming metal layers in openings within semiconductor wafers. This method includes the formation of an Inter-layer Dielectric (ILD) that aligns with the metal gate of a transistor. The ILD is etched to create a contact opening, and a metal layer is deposited using a PVD tool. This process ensures that the metal layer effectively interacts with the source/drain region to form a silicide region, enhancing the overall functionality of the semiconductor device.

Career Highlights

Hung Pin Lu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this company has allowed him to contribute to cutting-edge technologies that drive advancements in semiconductor manufacturing.

Collaborations

Hung has collaborated with talented coworkers, including Yu-Sheng Wang and Yu-Ting Lin. These collaborations have fostered an environment of innovation and creativity, leading to the development of groundbreaking technologies in the semiconductor field.

Conclusion

Hung Pin Lu's contributions to semiconductor technology through his patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as an influential inventor. His innovative methods for forming conductive structures and metal layers are paving the way for advancements in the industry.