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For the Inventor, By the Inventor

Hsinchu, Taiwan

Hung-Chih Wang

USPTO Granted Patents = 17 

Average Co-Inventor Count = 3.6

ph-index = 2

Forward Citations = 18(Granted Patents)


Location History:

  • Hsin-Chu, TW (2014 - 2022)
  • Zhubei, TW (2023 - 2024)
  • Taichung, TW (2024)

Company Filing History:

goldMedal16 out of 40,635 
 
Taiwan Semiconductor Manufacturing Comp. Ltd.
 patents
silverMedal1 out of 21 
 
Agricultural Technology Research Institute
 patents

Years Active: 2014-2025

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17 patents (USPTO):
1. 12394647 - Wafer shift detection (2025-08-19),
2. 12241157 - System and method for cleaning a pre-clean process chamber (2025-03-04),
3. 12142514 - Clamp ring and method of using clamp ring (2024-11-12),
4. 12040163 - Connect structure for semiconductor processing equipment (2024-07-16),
5. 12020994 - Power alarm and fire loading risk reduction for a deposition tool (2024-06-25),
6. 12002699 - Wafer pod transfer assembly (2024-06-04),
7. 11600506 - Wafer pod transfer assembly (2023-03-07),
8. 11462425 - Semiconductor processing station (2022-10-04),
9. 10801031 - Shuttle vector, prokaryotic host cells, kit, and method for producing proteins (2020-10-13),
10. 10763140 - Semiconductor processing station (2020-09-01),
11. 10103042 - Chamber, semiconductor processing station, and semiconductor process using the same (2018-10-16),
12. 9666545 - Semiconductor device with advanced pad structure resistant to plasma damage and metnod for forming same (2017-05-30),
13. 9385081 - Semiconductor device with advanced pad structure resistant to plasma damage and method for forming the same (2016-07-05),
14. 9287153 - Semiconductor baking apparatus and operation method thereof (2016-03-15),
15. 9006900 - Semiconductor device with advanced pad structure resistant to plasma damage and method for forming the same (2015-04-14),

Title: Innovations of Inventor Hung-Chih Wang

Introduction

Hung-Chih Wang is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 17 patents. His work focuses on improving processes and systems related to wafer handling and cleaning in semiconductor manufacturing.

Latest Patents

One of his latest patents is for a "Wafer Shift Detection" system. This invention includes a wafer storage elevator designed to detect wafer position shifts. The elevator features a first and second storage elevator sidewall, with a storage seat positioned between them. It incorporates two mirror blocks that reflect a laser beam to determine wafer misalignment based on sensor outputs. Another notable patent is for a "System and Method for Cleaning a Pre-Clean Process Chamber." This invention outlines a method for cleaning a pre-clean process chamber between wafer processing steps, utilizing plasma generated from specific gases at varying pressures.

Career Highlights

Hung-Chih Wang has worked with notable companies such as Taiwan Semiconductor Manufacturing Company Ltd. and the Agricultural Technology Research Institute. His experience in these organizations has allowed him to develop innovative solutions that enhance semiconductor manufacturing processes.

Collaborations

He has collaborated with esteemed colleagues, including Yuan-Hsin Chi and Sheng-Yuan Lin, contributing to advancements in their respective fields.

Conclusion

Hung-Chih Wang's innovative patents and career achievements highlight his significant impact on semiconductor technology. His work continues to influence the industry and improve manufacturing processes.

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