Hui Ling Han

Title: Innovations by Hui Ling Han

Introduction

Hui Ling Han is a prominent inventor based in Alameda, CA (US). She has made significant contributions to the field of semiconductor processing, holding 2 patents that showcase her innovative approach to technology.

Latest Patents

One of her latest patents is titled "Mid-ring erosion compensation in substrate processing systems." This invention involves a substrate processing system that includes a substrate support assembly designed to support a semiconductor substrate during processing. The system features a first edge ring that is movable relative to the substrate support assembly and a second edge ring positioned beneath it. A controller is integrated to compensate for the height of the first edge ring based on the erosion of both edge rings.

Another notable patent is "Automated transfer of edge ring requiring rotational alignment." This invention describes a ring storage station that delivers a consumable part to a substrate processing system. The housing of the station includes a base plate and a rotating plate, with openings for an end-effector and a service window. The design incorporates finger support structures that ensure proper alignment of consumable parts during transfer.

Career Highlights

Hui Ling Han is currently employed at Lam Research Corporation, a leading company in the semiconductor industry. Her work focuses on enhancing substrate processing systems, contributing to advancements in technology and efficiency.

Collaborations

Throughout her career, Hui has collaborated with notable colleagues, including Damon Tyrone Genetti and Roy Scott Powell. These partnerships have fostered innovation and development in her field.

Conclusion

Hui Ling Han's contributions to semiconductor processing through her patents reflect her dedication to innovation and technology. Her work continues to influence the industry and pave the way for future advancements.