Hui Li

Title: Hui Li - Innovator in Phase Unwrapping Technology

Introduction

Hui Li is a notable inventor based in Singapore, recognized for his contributions to the field of measurement technology. He has developed innovative systems and methods that enhance the accuracy of interferometric measurements, particularly in the context of patterned features on samples.

Latest Patents

Hui Li holds a patent titled "Detection aided two-stage phase unwrapping on pattern wafer geometry measurement." This patent outlines a sophisticated approach for unwrapping a phase map, which includes several key steps. The process begins with receiving a wrapped phase map associated with an interferometric measurement of a sample that includes patterned features. It involves removing a tilt from the wrapped phase map, generating a background, and detecting features in the wrapped phase. The features correspond to some of the patterned features of the sample. The method further includes replacing the phases of the features with the background at corresponding locations in the wrapped phase map, unwrapping the modified wrapped phase map using a global phase-unwrapping technique, applying local phase-unwrapping to restore the phases of the features, and finally reapplying the tilt to generate an output unwrapped phase map.

Career Highlights

Hui Li is currently employed at Kla Corporation, a company known for its advanced technology solutions in the semiconductor industry. His work at Kla Corporation has positioned him as a key player in the development of innovative measurement techniques that are crucial for the advancement of semiconductor manufacturing.

Collaborations

Hui Li collaborates with talented professionals in his field, including Guoqing Zhang and Helen Heng Liu. Their combined expertise contributes to the success of their projects and the advancement of technology in measurement systems.

Conclusion

Hui Li's innovative work in phase unwrapping technology demonstrates his significant impact on the field of measurement. His patent and contributions at Kla Corporation highlight his role as a leading inventor in this specialized area.