Hu-Li Sun

Title: Hu-Li Sun: Innovator in Wafer Platform Technology

Introduction

Hu-Li Sun is a notable inventor based in Yon-Kan, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of wafer platform technology. His innovative approach has led to advancements that enhance the precision of ion implantation processes.

Latest Patents

Hu-Li Sun holds a patent for an "Apparatus and method for detecting tilt angle of a wafer platform." This invention is crucial for accurately calibrating the zero-angle position of a wafer platform in medium energy ion implanters. The apparatus includes a process chamber with a cavity and a wafer platform, a transparent window for laser energy, and a laser emitter and receiver. This setup allows for the precise determination of the tilt angle of the wafer platform by analyzing the intensity of the reflected laser beam. He has 1 patent to his name.

Career Highlights

Hu-Li Sun is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading player in the semiconductor industry. His work has been instrumental in improving the efficiency and accuracy of ion implantation processes, which are vital for semiconductor fabrication.

Collaborations

He has collaborated with notable colleagues, including Hom-Chung Lin and Song-Yueha Lin, who have contributed to his research and development efforts.

Conclusion

Hu-Li Sun's innovative work in wafer platform technology exemplifies the importance of precision in semiconductor manufacturing. His contributions continue to influence the industry and pave the way for future advancements.