Hsin-Fu Tseng

Title: Hsin-Fu Tseng: Innovator in Semiconductor Technology

Introduction

Hsin-Fu Tseng is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patent related to extreme-ultraviolet (EUV) technology.

Latest Patents

Hsin-Fu Tseng holds a patent for an "EUV source with rotation crucible and laser and tin (Sn) auto-filling method." This invention features a tin (Sn) auto-filling device and system designed to supply new liquid Sn to the inner sidewall surface of a rotation crucible. The device utilizes a laser to expose the liquid Sn at the inner sidewall surface, generating extreme-ultraviolet light (EUV) that is essential for processing workpieces within a semiconductor manufacturing plant (FAB). The auto-filling device ensures that the liquid Sn is automatically replenished as it is consumed during the laser exposure.

Career Highlights

Hsin-Fu Tseng is currently employed at Taiwan Semiconductor Manufacturing Co., Ltd., a leading company in the semiconductor industry. His work focuses on advancing technologies that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Some of Hsin-Fu Tseng's notable coworkers include Chien-Hsing Lu and Chih-Chiang Tu. Their collaborative efforts contribute to the innovative environment at Taiwan Semiconductor Manufacturing Co., Ltd.

Conclusion

Hsin-Fu Tseng's contributions to semiconductor technology, particularly through his patent on EUV sources, highlight his role as a key innovator in the field. His work continues to influence advancements in semiconductor manufacturing processes.