Howard S Goad

Title: Howard S. Goad: Innovator in Photolithography

Introduction

Howard S. Goad is a notable inventor based in Austin, TX, recognized for his contributions to the field of photolithography. He holds 2 patents that reflect his innovative approach to addressing challenges in semiconductor manufacturing.

Latest Patents

One of Howard's latest patents is a photolithography test structure designed to measure the amount of notching associated with photolithography processing. This test structure features a curved insulating structure placed in close proximity to a conductive interconnect structure. A pair of conductive pads are deposited at opposite ends of the interconnect structure to measure the resistance through the interconnect. The resistance readings vary depending on the amount of notching associated with the interconnect. Test areas containing notched interconnect can be compared with controlled areas specifically designed not to have notching, allowing for the determination of relative changes in resistance and correlation with notching magnitude. The insulating structure, interconnect structure, and conductive pads are all processed on the same substrate material that contains the resulting product requiring testing.

Career Highlights

Howard S. Goad is currently employed at Advanced Micro Devices Corporation, where he continues to innovate in the semiconductor industry. His work has significantly contributed to advancements in photolithography techniques.

Collaborations

Throughout his career, Howard has collaborated with notable colleagues, including Derick J. Wristers and James H. Hussey, Jr. These collaborations have fostered a productive environment for innovation and development.

Conclusion

Howard S. Goad's work in photolithography exemplifies the impact of innovative thinking in technology. His patents and contributions to Advanced Micro Devices Corporation highlight his role as a key figure in the advancement of semiconductor manufacturing processes.