Company Filing History:
Years Active: 2012-2015
Title: Innovations by Hou Gong Wang in Atomic Layer Deposition
Introduction
Hou Gong Wang is a notable inventor based in Pleasanton, CA (US). He has made significant contributions to the field of atomic layer deposition (ALD), with a focus on plasma-enhanced ALD (PE-ALD). His work has led to the development of innovative apparatuses and methods that enhance the efficiency and effectiveness of ALD processes.
Latest Patents
Hou Gong Wang holds 2 patents related to his work in atomic layer deposition. His latest patents detail advanced apparatuses and methods for ALD, specifically focusing on the design of a PE-ALD chamber. This chamber includes a chamber lid assembly coupled with a chamber body that features a substrate support. The design incorporates an inlet manifold assembly with an annular channel and a centralized channel, which facilitates the injection of materials through strategically placed holes. Additionally, the chamber lid assembly is equipped with a showerhead assembly, a water box, and a remote plasma system, all of which work together to optimize the ALD process.
Career Highlights
Hou Gong Wang is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His expertise in atomic layer deposition has positioned him as a key contributor to the company's innovative projects. His work is instrumental in advancing the technology used in semiconductor manufacturing and other applications.
Collaborations
Throughout his career, Hou Gong Wang has collaborated with talented individuals such as Bo Zheng and Hua Ai. These collaborations have fostered a productive environment for innovation and have led to the successful development of new technologies in the field of atomic layer deposition.
Conclusion
Hou Gong Wang's contributions to atomic layer deposition through his patents and work at Applied Materials, Inc. highlight his role as a significant inventor in the field. His innovative approaches continue to influence advancements in materials engineering and semiconductor technology.
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