Company Filing History:
Years Active: 1995-2001
Title: The Innovative Contributions of Ho-Young Kang
Introduction
Ho-Young Kang, an esteemed inventor based in Suwon, South Korea, has made significant strides in the field of semiconductor technology. With a remarkable portfolio of nine patents, his work is shaping the future of semiconductor device fabrication and lithography processes.
Latest Patents
Kang's recent innovations include the development of capacitance compensation techniques for topological measurements in semiconductor devices. This specific patent addresses the reduction of focusing errors during exposure processes by forming a conductive layer over a wafer. This layer ensures that differences in capacitance measurements are not influenced by the underlying material and structure. As a result, it allows for accurate topology measurements, leading to more reliable exposure processing outcomes.
Another notable patent concerns a projection exposure system that employs a modified illumination method for lithography. This projection method enhances the exposure process of semiconductor devices by eliminating the vertical incident component of light, thereby increasing the resolution and depth of focus. Such innovations enable the formation of intricate patterns, including those needed for 64 Mb DRAMs, through conventional projection exposure systems.
Career Highlights
Kang's career has been marked by his dedication to advancing semiconductor technologies. His contributions not only improve measurement accuracy but also enhance the overall efficiency of lithography processes. Working at Samsung Electronics Co., Ltd., Kang has established himself as a key figure within the company, driving forward innovations that benefit the semiconductor industry.
Collaborations
Throughout his career, Ho-Young Kang has collaborated with notable peers, including Cheol-hong Kim and Seong-oon Choi. These collaborations reflect a team effort in pushing the boundaries of semiconductor research and development, fostering an environment of innovation.
Conclusion
Ho-Young Kang exemplifies the spirit of innovation within the semiconductor industry. His nine patents highlight his commitment to enhancing measurement techniques and lithography processes. As he continues to work at Samsung Electronics and partner with talented colleagues, the future of semiconductor technology is sure to witness further advancements inspired by his inventive spirit.