Location History:
- Ise-shi, Mie, JP (1980)
- Ise, JP (1981 - 2003)
- Mie, JP (2005 - 2007)
Company Filing History:
26 out of 227 
2 out of 4 
1 out of 1,100 Years Active: 1980-2007
Title: Hitoshi Kawano: A Pioneer in Wafer Conveyance Systems
Introduction
Hitoshi Kawano, an accomplished inventor based in Ise, Japan, holds an impressive portfolio of 28 patents. His innovative work primarily focuses on wafer conveyance systems, which are crucial in the semiconductor processing industry.
Latest Patents
Kawano's latest patents describe a sophisticated wafer conveyance system designed for transporting wafers during various processing stages. This system features a hermetically closed chamber that creates an isolated environment with a controlled atmosphere. Within this chamber, at least one guide path allows for the movement of a mobile element that transports wafers between different wafer processing apparatuses. A network of position sensors is strategically deployed along the guide path to accurately track the mobile element's position. Notably, the guide rails can be constructed from connectable rail units, facilitating easy reconfiguration without the need for repositioning the sensors. In a related patent, Kawano describes a wafer processing apparatus arranged in a row, featuring a mobile element powered by a linear motor and a wafer transfer robot that efficiently exchanges wafers among the different processing stages.
Career Highlights
Throughout his career, Hitoshi Kawano has significantly contributed to the semiconductor field. He has worked with Shinko Electric Company, Ltd., where he developed groundbreaking technologies that have greatly enhanced wafer processing capabilities.
Collaborations
Kawano has collaborated with notable colleagues such as Masanao Murata and Teruya Morita, sharing ideas and knowledge that have propelled their innovations in wafer processing technology.
Conclusion
Hitoshi Kawano's contributions to the realm of wafer conveyance systems and semiconductor processing have established him as a leading figure in his field. His patents and collaborative efforts showcase his commitment to innovation, making a lasting impact on the technologies that drive modern electronics.