The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2005
Filed:
Jan. 25, 2000
Takumi Mizokawa, Tokyo, JP;
Makoto Omori, Aichi, JP;
Yuzo Takakado, Aichi, JP;
Hitoshi Kawano, Mie, JP;
Takumi Mizokawa, Tokyo, JP;
Makoto Omori, Aichi, JP;
Yuzo Takakado, Aichi, JP;
Hitoshi Kawano, Mie, JP;
Shinko Electric Co., Ltd., Tokyo, JP;
Abstract
Wafer processing apparatus A-Z for performing processes A-Z on a wafer are arranged in a row. A chamberis formed parallel to these wafer processing apparatus, and a guide railis provided inside the chamber. A mobile elementdriven by means of a linear motor is provided on the guide rail, and a wafer transfer robotcapable of exchanging a wafer between the wafer processing apparatus is mounted on the mobile element. With this structure, the wafer transfer robotexchange wafers between wafer processing apparatus to perform each process on the wafers until the wafers are conveyed to the wafer processing apparatus Z.