Location History:
- Kyoto, JP (1995)
- Kokubu, JP (2003)
Company Filing History:
Years Active: 1995-2003
Title: Hitoshi Atari: Innovator in Electrostatic Chuck Technology
Introduction
Hitoshi Atari is a notable inventor based in Kokubu, Japan. He has made significant contributions to the field of electrostatic chuck technology, holding a total of 2 patents. His work is particularly relevant in the semiconductor manufacturing industry, where precision and reliability are paramount.
Latest Patents
Atari's latest inventions include two innovative electrostatic chucks. The first invention features a chucking body made of dielectric ceramics, which incorporates an electrostatic inner electrode. This design allows the chuck to effectively hold, fix, transport, and adjust wafers at high temperatures of 250 degrees Celsius and above, making it suitable for CVD, PVD, and high-temperature etching applications. The second invention is an electrostatic chuck constructed from single-crystalline sapphire, which boasts extremely low leak current, high mechanical strength, and a strong chucking force across a temperature range from room temperature to 500 degrees Celsius. This chuck operates efficiently within a voltage range of 500 to 2000 volts, ensuring that objects like silicon wafers remain less contaminated during processing.
Career Highlights
Hitoshi Atari is currently employed at Kyocera Corporation, where he continues to develop advanced technologies in the field of electrostatic chucks. His expertise and innovative spirit have positioned him as a key player in the industry.
Collaborations
Atari has collaborated with notable colleagues such as Kazuhiro Kuchimachi and Katsushi Sakaue, contributing to the advancement of electrostatic chuck technology through teamwork and shared expertise.
Conclusion
Hitoshi Atari's contributions to electrostatic chuck technology have made a significant impact on the semiconductor manufacturing industry. His innovative designs and patents reflect his commitment to advancing technology and improving manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.