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Hisashi Tsukazaki

USPTO Granted Patents = 5

Average Co-Inventor Count = 3.2

ph-index = 5

Forward Citations = 105(Granted Patents)

Location History:

Amagasaki, JP (1993)
Hyogo, JP (1989 - 1996)
Tokyo, JP (1998)

Company Filing History:

5 out of 21,351

Mitsubishi Denki Kabushiki Kaisha

Years Active: 1989-1998

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 5837094 - Semiconductor manufacturing apparatus (1998-11-17),

2. 5525158 - Thin film deposition apparatus (1996-06-11),

3. 5211994 - Apparatus for and method of forming thin film (1993-05-18),

4. 5099791 - Cluster beam thin film deposition apparatus with thermionic electron (1992-03-31),

5. 4812326 - Evaporation source with a shaped nozzle (1989-03-14),

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