Iruma, Japan

Hiroyuki Minowa


Average Co-Inventor Count = 3.0

ph-index = 1


Company Filing History:


Years Active: 2021-2022

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3 patents (USPTO):Explore Patents

Title: Hiroyuki Minowa: Innovator in Plasma Treatment Technology

Introduction

Hiroyuki Minowa is a notable inventor based in Iruma, Japan. He has made significant contributions to the field of plasma treatment technology, holding a total of 3 patents. His work focuses on improving the uniformity of film formation through innovative plasma treatment devices.

Latest Patents

Minowa's latest patents include a plasma treatment device and a structure of a reaction vessel for plasma treatment. The first invention enhances the in-plane uniformity of film formation via a plasma treatment. It features a plasma treatment device designed to exhaust process gas introduced between an electrode plate and a shower plate toward a counter electrode through multiple small holes in the shower plate. This device includes a diffuser plate with small holes arranged parallel to the shower plate, allowing the process gas to flow efficiently. The design ensures that the small holes in the downstream plate have smaller diameters, optimizing the flow and treatment process.

The second patent also aims to improve film uniformity during plasma treatment. It describes a plasma treatment device that consists of an electrode plate and a counter electrode arranged in a reaction vessel. The device includes a transmission plate for supplying frequency power to the electrode plate and an insulator that stores the electrode plate. The design ensures close contact between the electrode plate and the insulator, enhancing the efficiency of the plasma treatment process.

Career Highlights

Throughout his career, Hiroyuki Minowa has worked with several companies, including Core Technology, Inc. and Askagi Corporation. His experience in these organizations has contributed to his expertise in plasma treatment technologies and innovations.

Collaborations

Minowa has collaborated with notable individuals in his field, including Toshiaki Yoshimura and Lung Kei Amos Shek. These collaborations have likely enriched his work and led to further advancements in plasma treatment technology.

Conclusion

Hiroyuki Minowa is a distinguished inventor whose work in plasma treatment technology has led to significant advancements in the field. His innovative patents and collaborations reflect his commitment to improving film formation processes. His contributions continue to influence the industry and inspire future innovations.

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