Hiroyuki Itoh

Title: Hiroyuki Itoh: Innovator in Exposure Technology

Introduction

Hiroyuki Itoh is a prominent inventor based in Utsunomiya, Japan. He has made significant contributions to the field of exposure technology, particularly in the manufacturing of devices. With a total of 2 patents to his name, Itoh's work has had a considerable impact on the industry.

Latest Patents

Hiroyuki Itoh's latest patents include an exposure apparatus and a device manufacturing method. The exposure apparatus features a stage for holding a substrate at an exposure station, along with an arm mechanism for conveying a substrate to be exposed onto the stage. A sensor is integrated into either the stage or the arm mechanism to measure the temperature of the substrate. Based on the measured temperature, the pattern projection magnification to the workpiece is corrected, ensuring precision in the exposure process.

Another notable patent is the in-line processing system, which consists of an exposure processing unit and a coating and development processing unit. This system is equipped with a conveyance arm that transfers a workpiece between these units. The conveyance arm can access each unit, and both units maintain horizontal workpiece holding planes at a similar level. This design allows for the workpiece to be conveyed horizontally between the units, enhancing efficiency in the processing workflow.

Career Highlights

Hiroyuki Itoh is associated with Canon Kabushiki Kaisha, a leading company in imaging and optical products. His work at Canon has allowed him to develop innovative technologies that advance the capabilities of exposure systems.

Collaborations

Throughout his career, Itoh has collaborated with notable colleagues, including Shinji Tsutsui and Masahide Sato. These collaborations have contributed to the development of cutting-edge technologies in the field.

Conclusion

Hiroyuki Itoh's contributions to exposure technology through his patents and work at Canon Kabushiki Kaisha highlight his role as an influential inventor. His innovative solutions continue to shape the future of device manufacturing.