Hiroyuki Akama

Title: Hiroyuki Akama: Innovator in Film Forming Technology

Introduction

Hiroyuki Akama is a notable inventor based in Oshu, Japan. He has made significant contributions to the field of film forming technology, holding two patents that showcase his innovative approach to enhancing manufacturing processes.

Latest Patents

Akama's latest patents include a film forming apparatus designed to perform a predetermined film forming process on a substrate. This apparatus features a rotary table installed within a process vessel, which rotates while heating the substrate. It includes a contact type first temperature measuring part to measure the temperature of the heating part and a non-contact type second temperature measuring part to measure the temperature of the substrate. The control part of the apparatus regulates the power supplied to the heating part based on measurements from both temperature measuring parts. Notably, the control part adapts its method for controlling power during the film forming process and when the substrate is loaded or unloaded from the process vessel.

Career Highlights

Hiroyuki Akama is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work focuses on developing advanced technologies that improve the efficiency and effectiveness of film forming processes.

Collaborations

Throughout his career, Akama has collaborated with esteemed colleagues such as Masato Yonezawa and Shigehiro Miura. These collaborations have contributed to the advancement of technology in their field.

Conclusion

Hiroyuki Akama's innovative work in film forming technology has positioned him as a key figure in the industry. His patents reflect a commitment to improving manufacturing processes, and his collaborations further enhance the impact of his contributions.