Yokohama, Japan

Hiroto Yukawa


Average Co-Inventor Count = 3.9

ph-index = 5

Forward Citations = 216(Granted Patents)


Location History:

  • Zama, JP (2002)
  • Livingston, GB (2003 - 2004)
  • Yokohama, JP (2000 - 2006)

Company Filing History:


Years Active: 2000-2006

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14 patents (USPTO):

Title: **Hiroto Yukawa: Innovator in Semiconductor Photoresist Technology**

Introduction

Hiroto Yukawa, an accomplished inventor based in Yokohama, Japan, has made significant contributions to the field of semiconductor manufacturing through his innovations in photoresist technology. With a total of 14 patents to his name, Yukawa is renowned for his cutting-edge developments that enhance the patterning processes essential for modern electronic devices.

Latest Patents

Yukawa's latest patents include the development of a positive-working chemical-amplification photoresist composition. This invention is particularly noteworthy as it allows for satisfactory patterning of a photoresist layer, even when applied over substrates with an undercoating film of silicon nitride, phosphosilicate glass, or borosilicate glass. Unlike conventional photoresist compositions, this innovative solution significantly improves the patterning capabilities in semiconductor device manufacturing.

His research further led to another advanced positive-working chemical-amplification photoresist composition, capable of generating extremely finely patterned resist layers. This formulation comprises a copolymeric resin with specific hydroxyl-containing styrene units and a unique radiation-sensitive acid-generating agent. This innovative approach marks a substantial advancement in the efficiency and precision of semiconductor production.

Career Highlights

Throughout his illustrious career, Hiroto Yukawa has been affiliated with notable companies such as Tokyo Ohka Kogyo Co., Ltd. and Daito Chemix Corporation. His work at these institutions has been instrumental in driving forward the technology behind photoresist materials, paving the way for more efficient and reliable semiconductor manufacturing processes.

Collaborations

Yukawa's journey in the realm of innovation has also seen him collaborate with esteemed colleagues such as Katsumi Oomori and Ryusuke Uchida. These partnerships have fostered an environment of creativity and technical prowess, enabling significant advancements in photoresist technology and semiconductor fabrication processes.

Conclusion

Hiroto Yukawa is a pivotal figure in the semiconductor landscape, with his innovative approach to photoresist technology propelling advancements in the manufacturing of electronic devices. His numerous patents reflect a dedication to excellence and a commitment to innovation, ensuring that he remains a key player in shaping the future of semiconductor technology.

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