Hiroshi Sano

Title: Hiroshi Sano: Innovator in Substrate Processing Technology

Introduction

Hiroshi Sano is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate processing, holding a total of 9 patents. His innovative work focuses on improving the efficiency and reliability of substrate processing methods.

Latest Patents

One of Hiroshi Sano's latest patents is a substrate processing apparatus and method for the discharge of processing liquid from a nozzle. This invention features an upper processing liquid nozzle that moves back and forth between a processing position above a substrate held on a spin chuck and a standby position outside a processing cup. Before discharging the processing liquid, a camera captures a discharge standard image of the imaging region, which includes the nozzle's tip. By comparing multiple monitor target images taken successively by the camera to the discharge standard image, the system can reliably detect the discharge of processing liquid. This method effectively eliminates the influence of the substrate surface appearing as a background in the images.

Another notable patent is the automatic determination method of the inspection region for substrate holding state abnormality inspection. This method involves confirming the upper end surface of the substrate being held, determining the vertical position of the inspection region, and obtaining density information at the rotation start time of the substrate holding unit. This innovative approach enhances the accuracy of detecting abnormalities in the substrate holding state.

Career Highlights

Hiroshi Sano has worked with notable companies such as Dainippon Screen Manufacturing Co., Ltd. and Screen Holdings Co., Ltd. His experience in these organizations has allowed him to develop and refine his innovative ideas in substrate processing technology.

Collaborations

Throughout his career, Hiroshi has collaborated with talented individuals, including Atsushi Imamura and Hiroaki Kakuma. These collaborations have contributed to the advancement of his inventions and the overall progress in the field.

Conclusion

Hiroshi Sano is a distinguished inventor whose work in substrate processing technology has led to significant advancements. His innovative patents demonstrate his commitment to improving processing methods and ensuring reliability in the industry.