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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10242459 B1

PDFFull Text
Date of Patent:
Mar. 26, 2019

Filed:

Feb. 14, 2017

Automatic determination method of inspection region for substrate holding state abnormality inspection and substrate processing system

Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventor:

Hiroshi Sano, Kyoto, JP;

Assignee:

SCREEN Holdings Co., Ltd., , JP;

Attorney:

Ostrolenk Faber LLP

Primary Examiner:

Talha M Nawaz

Int. Cl.
CPC ...
H04N 9/47 (2006.01); H04N 7/18 (2006.01); G06T 7/73 (2017.01); G01B 11/00 (2006.01); G06K 9/20 (2006.01); G06T 7/00 (2017.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); H01L 21/66 (2006.01); G06K 9/32 (2006.01); G06K 9/46 (2006.01); G06K 9/56 (2006.01); G01B 11/27 (2006.01);
U.S. Cl.
CPC ...
G06T 7/74 (2017.01); G01B 11/002 (2013.01); G01B 11/27 (2013.01); G06K 9/2054 (2013.01); G06K 9/3233 (2013.01); G06K 9/4642 (2013.01); G06K 9/56 (2013.01); G06T 7/001 (2013.01); H01L 21/67259 (2013.01); H01L 21/67288 (2013.01); H01L 21/68728 (2013.01); H01L 21/68735 (2013.01); H01L 21/68785 (2013.01); H01L 22/12 (2013.01); G06K 2209/19 (2013.01); G06T 2207/30148 (2013.01);
Abstract

With regard to an inspection region for inspecting abnormality of a holding state of the substrate in an image of the substrate holding unit, (1) an upper end surface of the substrate being normally held by the substrate holding unit is confirmed, (2) based on a position of the upper end surface of the substrate that has been confirmed, a position of the inspection region in a vertical direction is determined, and (3) for a candidate of the inspection region of which the position in the vertical direction has been determined, density thereof at a rotation start time of the substrate holding unit is obtained, a horizontal position of the inspection region is determined based on a difference image integrated value, which is an integrated value of a difference absolute value with density of the same region in an initial state of the substrate holding unit.

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