Company Filing History:
Years Active: 2017-2018
Title: Innovations by Hiroshi Nishihata
Introduction
Hiroshi Nishihata is a notable inventor based in Koshi, Japan. He has made significant contributions to the field of liquid processing technology. With a total of 2 patents, his work focuses on enhancing the efficiency and effectiveness of liquid processing methods and apparatuses.
Latest Patents
Hiroshi Nishihata's latest patents include a liquid processing method, memory medium, and liquid processing apparatus. The liquid processing apparatus is designed to process a substrate by utilizing a substrate holding device that rotates the substrate in a horizontal position. It features a nozzle holding device that holds processing liquid and gas nozzles. The liquid nozzle discharges processing liquid obliquely to the surface of the substrate, while the gas nozzle discharges gas perpendicularly to the substrate's surface. This innovative design allows for precise control of the liquid and gas discharge during the substrate's rotation.
The liquid processing method involves setting a substrate on a holding device that rotates it horizontally. Processing liquid is supplied to the center portion of the substrate, ensuring effective liquid processing. The discharge port of the processing liquid nozzle is positioned to discharge liquid obliquely to the peripheral portion of the substrate while gas is discharged perpendicularly to the surface. This method enhances the overall efficiency of the liquid processing operation.
Career Highlights
Hiroshi Nishihata is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has allowed him to develop and refine his innovative technologies in liquid processing.
Collaborations
Hiroshi has collaborated with talented coworkers, including Akiko Kai and Takafumi Niwa. Their combined expertise has contributed to the advancement of liquid processing technologies.
Conclusion
Hiroshi Nishihata's contributions to liquid processing technology through his patents and work at Tokyo Electron Limited highlight his innovative spirit and dedication to advancing the field. His inventions are paving the way for more efficient liquid processing methods and apparatuses.