Hiroshi Kubota

Title: Hiroshi Kubota: Innovator in Semiconductor Manufacturing

Introduction

Hiroshi Kubota is a prominent inventor based in Yokkaichi, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding two patents that showcase his innovative approach to technology.

Latest Patents

Hiroshi Kubota's latest patents include a semiconductor manufacturing apparatus and a method of manufacturing semiconductor devices. In one embodiment, his semiconductor manufacturing apparatus features a substrate processor designed to process a substrate using a gas of a first substance and a gas of a second substance. This apparatus is capable of discharging a first gas that includes either the first substance or the second substance. Additionally, it includes a disposer that discards the first gas discharged from the substrate processor. Furthermore, the apparatus has a recoverer that generates a second gas containing the second substance by utilizing the first substance from the first gas, which is then supplied back to the substrate processor.

Another patent focuses on a semiconductor manufacturing apparatus that consists of a first gas feeder, a first gas processor, and a second gas feeder. The first gas feeder is positioned above a stage where the substrate is placed and feeds a first gas to the substrate. The first gas processor applies high-frequency power to the stage, converting the first gas into plasma. The second gas feeder, also located above the stage, introduces a second gas that is more challenging to convert into plasma than the first gas, surrounding the plasma-rendered first gas.

Career Highlights

Hiroshi Kubota is currently employed at Kioxia Corporation, where he continues to advance semiconductor technology. His work has been instrumental in enhancing the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Hiroshi collaborates with talented coworkers, including Yuya Matsubara and Motoki Fujii, who contribute to the innovative environment at Kioxia Corporation.

Conclusion

Hiroshi Kubota's contributions to semiconductor manufacturing through his patents reflect his dedication to innovation in technology. His work continues to influence the industry and pave the way for future advancements.