Hiroshi Kikuchi

Title: Hiroshi Kikuchi: Innovator in Surface Inspection Technology

Introduction

Hiroshi Kikuchi is a prominent inventor based in Hitachi, Japan. He has made significant contributions to the field of surface inspection technology, holding three patents that showcase his innovative approach to problem-solving in this area.

Latest Patents

Kikuchi's latest patents include a surface inspection apparatus and a surface inspection method. The surface inspection apparatus features a blocking unit that groups data items into blocks with an arbitrary number of data items. This unit is designed to change the number of data items to be blocked based on instructions from a state monitoring unit, ensuring that data does not overflow from memory. The threshold processing unit acquires data items with values larger than a specified threshold and transmits them to memory, while the state monitoring unit keeps track of the memory's available capacity.

Another notable patent is the inspecting apparatus and inspecting method, which utilizes a multi-anode detector to detect scattered light from a wafer. This method calculates various parameters, such as the shape of the beam radiated to the wafer and the rotational shift between the radius direction and the beam's long side. It also includes a feedback technique that adjusts inspection signal data based on correction quantities for rotation and amplitude, thereby improving the positional accuracy of defect inspection and the accuracy of defect level measurements.

Career Highlights

Hiroshi Kikuchi is associated with Hitachi High-Technologies Corporation, where he has been instrumental in advancing surface inspection technologies. His work has significantly impacted the efficiency and accuracy of defect detection in various applications.

Collaborations

Kikuchi has collaborated with notable colleagues, including Yuji Inoue and Nobuhiro Obara, contributing to the development of innovative solutions in the field of surface inspection.

Conclusion

Hiroshi Kikuchi's contributions to surface inspection technology through his patents and work at Hitachi High-Technologies Corporation highlight his role as a key innovator in this field. His advancements continue to influence the industry and improve inspection methodologies.