Company Filing History:
Years Active: 1995-2002
Title: Hiromi Shizu: Innovator in Refractory Metal Silicide Technology
Introduction
Hiromi Shizu is a distinguished inventor based in Fujisawa, Japan, known for her groundbreaking work in the field of semiconductor materials. With a remarkable portfolio of 8 patents, Shizu has significantly contributed to advancements in refractory metal silicide targets, which are essential for the manufacturing of reliable semiconductor devices.
Latest Patents
One of her latest patents focuses on a refractory metal silicide target, method of manufacturing the target, refractory metal silicide thin film, and semiconductor device. This innovative target is characterized by a fine mixed structure comprised of MSi grains and Si grains. Specifically, the number of MSi grains in a 0.01 mm cross-section is limited to 15, ensuring a high-density and high-purity composition. The fine mixed structure features MSi grains with an average size of no more than 10 µm and free Si grains that do not exceed 20 µm in size. This meticulous design is instrumental in reducing particle production during sputtering and minimizing film resistance changes, leading to enhanced yield and reliability in semiconductor manufacturing.
Career Highlights
Shizu's career has been marked by her innovative contributions while working at Kabushiki Kaisha Toshiba, where she has been at the forefront of research and development in semiconductor materials.
Collaborations
Throughout her career, Shizu has collaborated with notable coworkers such as Noriaki Yagi and Michio Satou. These partnerships have led to successful projects that push the boundaries of technology and improve the manufacturing processes of semiconductor devices.
Conclusion
Hiromi Shizu's inventions underscore her commitment to innovation within the semiconductor industry. Her latest patents reflect the importance of advancing materials that can enhance the efficiency and reliability of semiconductor devices. As her research continues, Shizu remains an influential figure in the world of materials science and semiconductor technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.